Aurora Veritas™

Real-time Visualization and Control for Diffusion and Annealing Furnaces

Veritas coordinates measurements from Aurora’s Decima™ system with furnace wafer positions to visualize and characterize process performance.  This easy to interpret graphical visualization enables manufacturers to quickly detect, diagnose and resolve process issues, and to efficiently optimize furnace parameters leading to higher yields of top quality cells. 

Our Vision

Our vision is to deliver innovative inline measurement products and services that generate results by making our customers more profitable.

Whitepapers & Resources

Decima 3T datasheet
PDF FORMAT – 666.94 KB
Decima Gemini datasheet
PDF FORMAT – 369.7 KB
Decima CD datasheet
PDF FORMAT – 739.13 KB

+ MORE WHITEPAPERS & RESOURCES